Electron energy filter with magnetic deflection unit

摘要

In a part connected in series to an energy filter (3) an electron-optical imaging system has an electron source (2) and a multi-stage capacitor of three single magnetic lenses (4a-4c) and a capacitor objective single-field lens (COSFL) (6) downstream from the three single magnetic lenses. A goniometer (5) at the height of a pole shoe gap in the COSFL holds a specimen to be examined.