FOUP STOCKER AND HEAT TREATMENT APPARATUS WITH THE SAME,申请号KR20100021686-传众专利搜索

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发明名称	FOUP STOCKER AND HEAT TREATMENT APPARATUS WITH THE SAME
摘要
申请公布号	KR20110102599(A)	申请公布日期	2011.09.19
申请号	KR20100021686	申请日期	2010.03.11
申请人	YEST CO., LTD.	发明人	SEO, YONG JIN
分类号	H01L21/68;H01L21/324;H01L21/677	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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