Isolation process for surface micromachined sensors and actuators,申请号SG19970002944-传众专利搜索

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发明名称	Isolation process for surface micromachined sensors and actuators
摘要
申请公布号	SG68630(A1)	申请公布日期	1999.11.16
申请号	SG19970002944	申请日期	1996.10.18
申请人	EG & G INTERNATIONAL;INSTITUTE OF MICROELECTRONICS NATIONAL UNIVERSITY OF SINGAPORE	发明人	SRIDHAR UPPILI;JUN LIU LIAN;DOW FOO PANG;HONG LOH YONG;BO MAIO YU
分类号	B81B3/00;B81C1/00;G01L9/00;G01P15/08;(IPC1-7):H01L21/76;G01C19/56	主分类号	B81B3/00
代理机构		代理人
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