| 摘要 |
A compact, integrated LIDAR system utilizes SOI-based optoelectronic components to provide for lower cost and higher reliability as compared to current LIDAR systems Preferably, an SOI-based LIDAR transmitter and an SOI- based LIDAR receiver (both optical components and electrical components) are integrated within a single module The various optical and electrical components are formed utilizing portions of the SO1 layer and applying well- known CMOS fabrication processes, including the formation of additional layer(s) over the SO1 layer to provide the required devices A laser source itself is attached to the SO1 arrangement and coupled through an integrated modulation device to provide the scanning laser output signal The return, reflected optical signal is received by a photodetector integrated within th e SO1 arrangement, where it is thereafter converted into an electrical signal and subjected to various types of signal processing to perform the desired type(s) of signal characterization/signature analysis.
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