| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a foreign matter inspection method which enables enhancement of the foreign matter detection sensitivity for the sample as a whole to simply inspect foreign matters, and to provide a foreign matter inspection system. <P>SOLUTION: The foreign matter inspection method for detecting the location, where the brightness of the image of the sample is lower than the detection threshold of foreign matter, as foreign matter has an irradiation step for irradiating the sample a plurality of regions different in transmissivity and reflectivity with vertical illumination light and reflected illumination light; an imaging step for receiving the reflected light reflected by the sample and the transmitted light transmitted through the sample to image the sample; a foreign matter detection step for detecting the foreign matter by using the foreign matter detection threshold, corresponding to the level of the lowest region, a region extraction step for extracting a region lowest in luminance and a region containing the foreign matter detected in the foreign matter detection step, on the basis of a region extraction threshold higher than the foreign matter detection threshold value and a step for repeatedly performing the foreign matter detection step and the region extraction step, with respect to the image masking the extracted region. <P>COPYRIGHT: (C)2008,JPO&INPIT</p> |
