| 摘要 |
The present invention relates to a contactless machining apparatus capable of performing precise processing by being moved in multiple directions of an article to be processed while processing the article to be processed through beam irradiation, and also capable of promoting precision improvement by preventing overheat inside a vacuum chamber. The apparatus comprises: a vacuum chamber providing the inside thereof with a vacuum pressure; a beam irradiator built in the vacuum chamber to irradiate a beam to a lower part; a fixture which fixes an article to be processed on the surface thereof while being installed in the lower part of the beam irradiator and is formed in a frame shape to allow the beam of the beam irradiator to pass therethrough; a multidirectional transfer device which is installed in the lower part of the fixture to be fixed on the vacuum chamber, and processes the article to be processed into a set pattern while transferring the fixture in multiple directions; and a bottom cooler for cooling, through circulation of coolant, the bottom surface of the vacuum chamber at which the beam of the beam irradiator arrives, thereby preventing overheat inside the vacuum chamber. |
