| 摘要 |
PROBLEM TO BE SOLVED: To reduce costs and to reduce the radial dimension of an entire device within a vacuum chamber by reducing the diameters of bearings which support driven members rotating within the vacuum chamber. SOLUTION: A partition wall 33 formed in a bottomed, cylindrical shape is secured to one of the opposite walls of a vacuum chamber such as a transfer chamber 1, with the cylindrical part of the partition wall 33 projecting outside of the vacuum chamber, and with the inside and outside of the partition wall 33 directed respectively to the inner side and the atmosphere side of the vacuum chamber. Magnet couplings MC1, MC2 comprising outer and inner magnets which face each other across the partition wall 33 are arranged on the cylindrical part of the partition wall 33 and the output members of motors 29a, 29b supported on the outside of the vacuum chamber are connected to the outer magnets 32a, 32b of the magnet couplings M1, MC2. Driven members 36a, 36b are connected to the inner magnets 37a, 37b of the magnet couplings MC1, MC2 and are supported against bearings provided at support members 34a, 34b provided within the vacuum chamber. |
