Field asymmetric ion mobility spectrometry filter

摘要

Ion filter for FAIMS fabricated using the LIGA technique. The ion filter is manufactured using a metal layer to form the ion channels and an insulating support layer to hold the structure rigidly together after separation of the metal layer into two electrodes.

主权项

1. A system for filtering ions, including: a controller; and an ion filter device comprising: at least one metal electrode layer; at least one ion channel formed through the at least one electrode layer; and at least one support layer adjacent the at least one electrode layer and configured to maintain regions of the at least one electrode layer in fixed relative positions, the at least one support layer including an aperture formed therein configured to permit gas to flow therethrough and further including one or more apertures in proximity to the ion filter device configured to restrict the gas flow to a specified region of the ion filter device and a mechanism for varying the dimensions of the one or more apertures to adjust the size of the region of the ion filter device through which gas flows.