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发明名称
Lückenfüllungs- und Planarisierungsverfahren für flache Grabenisolation
摘要
申请公布号
DE69737433(D1)
申请公布日期
2007.04.19
申请号
DE19976037433
申请日期
1997.08.07
申请人
INFINEON TECHNOLOGIES AG
发明人
WEIGAND, PETER
分类号
H01L21/76;H01L21/762;H01L21/3105
主分类号
H01L21/76
代理机构
代理人
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地址
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