METHOD OF MANUFACTURING MICRO AND NANO-STRUCTURES

摘要

PROBLEM TO BE SOLVED: To form an array of optical elements having an optional shape on a substrate.

SOLUTION: The method of forming an array of optical elements having an optional shape on a substrate 30 includes a step of providing a substrate 30 having an optical layer 35 arranged on its top portion; a step of arranging a layer 40 of particles 45 on the optical layer 35; and a step of performing an etching cycle. The cycle includes a step of etching the particle layer using a first etching process to reduce the size of particles 45 in the particle layer, and a subsequent step of simultaneously etching the optical layer and the particle layer using a second etching process so as to further reduce the particles to form a mask over the area of the optical layer so that optical elements can be created separately from the optical layer 35.

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