AMINO SULFONIC ACID BASED POLYMERS FOR COPPER ELECTROPLATING

摘要

PROBLEM TO BE SOLVED: To provide polymers that may be used as levelers in copper electroplating baths to improve the uniformity of plating and the quality of metal deposits.SOLUTION: Amino sulfonic acid based polymers are reaction products of amino sulfonic acids, an amine, polyepoxide compounds and epihalohydrin. The polymers are used as levelers in copper electroplating baths in order to provide good throwing power. The reaction products may plate copper or copper alloys with good surface properties and good physical reliability.SELECTED DRAWING: None