| 发明名称 |
NOVEL NON-CRYSTALLINE OXIDES FOR USE IN MICROELECTRONIC, OPTICAL, AND OTHER APPLICATIONS |
| 摘要 |
The invention relates to non-crystalline oxides of formulas (I) and (II), and methods of forming the same, along with field effect transistors, articles of manufacture, and microelectronic devices comprising the non-crystalline oxides. |
| 申请公布号 |
WO0201622(A2) |
申请公布日期 |
2002.01.03 |
| 申请号 |
WO2001US19787 |
申请日期 |
2001.06.21 |
| 申请人 |
NORTH CAROLINA STATE UNIVERSITY |
发明人 |
LUCOVSKY, GERALD;PARSONS, GREGORY, N. |
| 分类号 |
C01B13/14;C01F17/00;C01G25/02;C01G27/02;C01G35/00;C23C16/40;H01L21/314;H01L21/316;H01L29/51;H01L29/78;H01L33/00 |
主分类号 |
C01B13/14 |
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