Device for calibrating a scatterometer

摘要

A calibration device is described for calibrating a scatterometer, which is designed in particular for measuring a particle concentration in exhaust gases of motor vehicles. The calibration device has at least one scattering body which emits scattered light having a defined intensity and distribution when irradiated with a light beam, the scattering body having an emission surface for the scattered light, to which is assigned at least one light sensor for detecting the scattered light exiting the emission surface. A screening body having at least one screen opening through which the scattered light exits in the direction of the at least one light sensor is assigned to the emission surface of the scattering body.

主权项

1. A calibration device for calibrating a scatterometer, comprising:
at least one scattering body that emits scattered light at a defined intensity and distribution when irradiated by a light beam, wherein the scattering body includes an emission surface for the scattered light; at least one light sensor assigned to the emission surface and for detecting the scattered light exiting the emission surface; a screening body including at least one screen opening through which the scattered light exits in a direction of the at least one light sensor, the screening body assigned to the emission surface of the scattering body; a carrier including a receptacle for the scattering body, wherein on account of the carrier the scattering body is positioned in a defined position within a measuring chamber of the scatterometer, wherein:
the carrier has a form of a pin that is insertable into an opening of a housing of the scatterometer using a guide section, so that the scattering body accommodated in the pin is located within the measuring chamber in a beam path of the light beam,the pin is embodied from a hollow cylinder pin having a cylinder wall and having a cavity formed within the cylinder wall,the cylinder wall is insertable into the opening of the housing using the guide section, andthe screening body is formed from the cylinder wall, into which at least one penetration is introduced for forming the at least one screen opening.