| 发明名称 | Pressure sensor chip | ||
| 摘要 | A pressure sensor chip is provided with first and second retaining members. The peripheral edge portions of the first and second retaining members are bonded to face one face and another face of a diaphragm, respectively. An inner edge of the peripheral edge portion of the first retaining member is positioned further to the outside than an inner edge of the peripheral edge portion of the second retaining member. | ||
| 申请公布号 | US9360387(B2) | 申请公布日期 | 2016.06.07 |
| 申请号 | US201314053041 | 申请日期 | 2013.10.14 |
| 申请人 | AZBIL CORPORATION | 发明人 | Tokuda Tomohisa;Seto Yuuki |
| 分类号 | G01L9/00;G01L13/02;G01L9/06 | 主分类号 | G01L9/00 |
| 代理机构 | Troutman Sanders LLP | 代理人 | Troutman Sanders LLP |
| 主权项 | 1. A pressure sensor chip comprising: a sensor diaphragm for outputting a signal in accordance with a difference in applied pressures between a first face and a second face, wherein the second face is opposite the first face; a first retaining member comprising a first peripheral edge portion bonded to the first face of the sensor diaphragm; and a second retaining member disposed on the second face of the diaphragm, comprising a second peripheral edge portion bonded to the second face of the diaphragm; wherein an inner edge of the first peripheral edge portion of the first retaining member is positioned further to the outside than an inner edge of the second peripheral edge portion of the second retaining member. | ||
| 地址 | Tokyo JP | ||