Methods for measuring a thickness of an object

摘要

A method for analyzing an object includes measuring a first reflectivity of light from a surface and measuring a second reflectivity of light from the object, after the object is formed on the surface. A variation between the first and second reflectivities is calculated, and the variation is transformed by a predetermined transform. A thickness of the object is determined based on the transformed variation.

主权项

1. A method for analyzing an object, the method comprising:
measuring a first X-ray reflectivity from a substrate before formation of the object, measuring the first X-ray reflectivity including measuring a first X-ray reflectivity spectrum; forming the object on the substrate; measuring a second X-ray reflectivity from the substrate after the formation of the object, measuring the second X-ray reflectivity includes measuring a second X-ray reflectivity spectrum; generating a delta spectrum between the first and second X-ray reflectivity spectrums, the delta spectrum corresponding to a variation between the first and second X-ray reflectivities; transforming the variation using a fast-Fourier transform; and determining a thickness of the object based on the transformed variation.