| 摘要 |
PROBLEM TO BE SOLVED: To provide a hydrogen analysis method allowing high-sensitive measurement of a small amount of hydrogen existing in a gas containing helium.SOLUTION: The concentration of hydrogen, which exists as an impurity in measurement-target gas containing helium, is measured by using a gas chromatograph for combustible gas measurement in which a semiconductor sensor including a metal oxide as a detection element is used as a detector. In this method, as a carrier gas of the gas chromatograph, a mixed gas of helium and oxygen is used. The amount of mixed oxygen in the mixed gas of helium and oxygen is preferably in the range of 15 to 35 vol%. |
