发明名称 |
P-TYPE IMPURITY DIFFUSION COMPOSITION, METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT USING SAID COMPOSITION, SOLAR CELL, AND METHOD FOR MANUFACTURING SAID SOLAR CELL |
摘要 |
The purpose of the present invention is to provide a p-type impurity diffusion composition with which it is possible to improve storage stability of a coating liquid, and to achieve uniform diffusion of the coating liquid on a semiconductor substrate. In order to achieve the above-mentioned purpose, the present invention has the following composition. Namely, a p-type impurity diffusion composition characterized by including (A) a group-13 element compound, (B) a hydroxyl-group-containing polymer, and (C) an organic solvent, (C1) a cyclic ester solvent being contained as the organic solvent. |
申请公布号 |
WO2016136474(A1) |
申请公布日期 |
2016.09.01 |
申请号 |
WO2016JP53974 |
申请日期 |
2016.02.10 |
申请人 |
TORAY INDUSTRIES, INC. |
发明人 |
IKEGAMI, Yoshihiro;MURASE, Seiichiro;INABA, Sachio |
分类号 |
H01L21/225;H01L31/18 |
主分类号 |
H01L21/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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