发明名称 P-TYPE IMPURITY DIFFUSION COMPOSITION, METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT USING SAID COMPOSITION, SOLAR CELL, AND METHOD FOR MANUFACTURING SAID SOLAR CELL
摘要 The purpose of the present invention is to provide a p-type impurity diffusion composition with which it is possible to improve storage stability of a coating liquid, and to achieve uniform diffusion of the coating liquid on a semiconductor substrate. In order to achieve the above-mentioned purpose, the present invention has the following composition. Namely, a p-type impurity diffusion composition characterized by including (A) a group-13 element compound, (B) a hydroxyl-group-containing polymer, and (C) an organic solvent, (C1) a cyclic ester solvent being contained as the organic solvent.
申请公布号 WO2016136474(A1) 申请公布日期 2016.09.01
申请号 WO2016JP53974 申请日期 2016.02.10
申请人 TORAY INDUSTRIES, INC. 发明人 IKEGAMI, Yoshihiro;MURASE, Seiichiro;INABA, Sachio
分类号 H01L21/225;H01L31/18 主分类号 H01L21/225
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