A sensor assembly (100) has a substrate (102) with a microchannel (104) formed therein through which a fluid flows. At least one sensor (106) is proximate to the microchannel. The temperature of the at least one sensor or fluid indicates the condition of the fluid including the flow rate and the presence of gas bubbles and particulate substance.
申请公布号
WO0140738(A8)
申请公布日期
2001.11.22
申请号
WO2000US32663
申请日期
2000.11.30
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY;TAI, YU-CHONG;WU, SHUYUN;LIN, QIAO