发明名称 MICROELECTROMECHANICAL SYSTEM SENSOR ASSEMBLY
摘要 A sensor assembly (100) has a substrate (102) with a microchannel (104) formed therein through which a fluid flows. At least one sensor (106) is proximate to the microchannel. The temperature of the at least one sensor or fluid indicates the condition of the fluid including the flow rate and the presence of gas bubbles and particulate substance.
申请公布号 WO0140738(A8) 申请公布日期 2001.11.22
申请号 WO2000US32663 申请日期 2000.11.30
申请人 CALIFORNIA INSTITUTE OF TECHNOLOGY;TAI, YU-CHONG;WU, SHUYUN;LIN, QIAO 发明人 TAI, YU-CHONG;WU, SHUYUN;LIN, QIAO
分类号 G01F1/684 主分类号 G01F1/684
代理机构 代理人
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