发明名称 Protective treatment for porous materials
摘要 The invention relates to a method for treating a surface of a porous material in an environment, said method comprising the steps of: I. Setting the temperature of said surface to a value T1 and setting the pressure of said environment to a value P1, II. contacting said surface with a fluid having a solidifying temperature at said pressure value P1 above said value T1 and having a vaporizing temperature at said pressure value P1 below 80°C, thereby solidifying said fluid in pores of said material, thereby sealing said pores, III. treating said surface, wherein said treatment is preferably an etching or a modification of said surface, IV. Setting the temperature of said surface to a value T2 and setting the pressure of said environment to a value P2 in such a way as to vaporize said fluid,
申请公布号 EP2595182(B1) 申请公布日期 2016.09.14
申请号 EP20110189233 申请日期 2011.11.15
申请人 IMEC;GLOBALFOUNDRIES, INC. 发明人 BAKLANOV, MIKHAÏL;IACOPI, FRANCESCA;VANHAELEMEERSCH, SERGE
分类号 H01L21/768;H01L21/3105 主分类号 H01L21/768
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