| 摘要 |
PROBLEM TO BE SOLVED: To provide an electrostatic actuator which can be stably driven at a high speed and a high frequency by reducing a size of a chip, a liquid droplet discharge head, and a liquid droplet discharge device. SOLUTION: This liquid droplet jet head comprises a cavity substrate 20 having a bottom wall as a diaphragm 22 and formed thereon an ejection chamber 21 for ejecting ink droplets by using pressure variation due to deformation of the diaphragm 22, and an electrode substrate 30 having formed thereon a discrete electrode 31a and a discrete electrode 31b which are opposed to the diaphragm 22, are laminated to each other with an insulation film 33 therebetween and respectively form gaps A, B having different distances between them and the respective diaphragms 22. Independent drive voltages are applied to the discrete electrode 31a and the discrete electrode 31b, respectively, and then the diaphragms 22 are driven by the generated electrostatic force, thereby discharging ink droplets. COPYRIGHT: (C)2007,JPO&INPIT
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