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发明名称
Chemisch verstärkte, positiv arbeitende Resistzusammensetzung
摘要
申请公布号
DE60100463(T2)
申请公布日期
2004.05.13
申请号
DE2001600463T
申请日期
2001.04.02
申请人
SUMITOMO CHEMICAL CO., LTD.
发明人
UETANI, YASUNORI;YAMADA, AIRI;MIYA, YOSHIKO;TAKATA, YOSHIYUKI
分类号
G03F7/004;G03F7/039;(IPC1-7):G03F7/039
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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