发明名称 METHOD FOR MASS SPECTROMETRIC EXAMINATION OF GAS MIXTURES AND MASS SPECTROMETER THEREFOR
摘要 A method includes parallel or serial ionization of a gas mixture by activating at least two ionization devices operating using different ionization procedures, and/or by ionizing the gas mixture in a detector to which the gas mixture and ions and/or metastable particles of an ionization gas are fed. The method also includes detecting the ionized gas mixture in the detector for the mass spectrometric examination thereof. A mass spectrometer for mass spectrometric examination of gas mixtures includes an ionization unit for ionizing a gas mixture and a detector for detecting the ionized gas mixture.
申请公布号 US2016372310(A1) 申请公布日期 2016.12.22
申请号 US201615244720 申请日期 2016.08.23
申请人 Carl Zeiss SMT GmbH ;Carl Zeiss Microscopy GmbH 发明人 Chung Hin Yiu Anthony;Aliman Michel;Fedosenko Gennady;Ranck Albrecht
分类号 H01J49/00;H01J37/32;H01J49/42;H01J49/10;H01J49/14 主分类号 H01J49/00
代理机构 代理人
主权项
地址 Oberkochen DE