| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of measuring a layer thickness of an opaque laminate having a plurality of opaque layers laminated that can measure a thickness of an opaque layer in a short time.SOLUTION: A method includes: a fourth step (step U4) of determining whether an object of irradiation with white light WL has changed from a second electrode composite layer 14 (first opaque layer) to a solid electrolyte layer 13 (second opaque layer) on the basis of an analytic result of spectral analysis; and a fifth step (step U5) of, when it is determined in the fourth step that the object of irradiation with the white light WL has changed from the second electrode composite layer 14 to the solid electrolyte layer 13, utilizing correlation, having been previously grasped, between a value corresponding to the number of irradiation pulses of a pulse laser PL and a removal depth of the second electrode composite layer 14 so as to find, from an integrated value of values corresponding to the number of irradiation pulses having been integrated so far, a removal depth of the second electrode composite layer 14 corresponding to the integrated value, and acquiring the removal depth as a thickness of the second electrode composite layer 14.SELECTED DRAWING: Figure 6 |
