| 摘要 |
PROBLEM TO BE SOLVED: To provide a stripper composition for resist for removing a remaining modified resist, an embedding material and a so-called polymer such as an etching residue on an electronic board having metal wiring without corroding not only aluminum wiring but metal wiring such as copper and an insulating film such as a low-k film (a film with a low dielectric constant), and to provide a method for manufacturing an electronic board including a process of stripping a resist by using the above stripper composition. SOLUTION: The stripper composition for resist comprises a water-soluble amine and/or ammonium compound, an oxidizing agent, sugar and water. The method for manufacturing an electronic board includes a process of stripping the resist by using the stripper composition. COPYRIGHT: (C)2005,JPO&NCIPI |
