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发明名称
SCHMALBANDIGER SPEKTRALFILTER UND SEINE VERWENDUNG
摘要
申请公布号
DE50207927(D1)
申请公布日期
2006.10.05
申请号
DE20025007927
申请日期
2002.01.25
申请人
CARL ZEISS SMT AG
发明人
WEDOWSKI, MARCO
分类号
G21K1/10;G21K3/00;G02B5/22;G03F7/20;H01L21/027
主分类号
G21K1/10
代理机构
代理人
主权项
地址
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