发明名称 Sensor arrangement
摘要 A sensor arrangement (100) comprises a sensor chip (200). The sensor chip (200) comprises a sensor (300) sensitive to a variable to be measured. The sensor (300) provides a sensor signal (x). The sensor chip (200) further comprises a stress sensor (400) sensitive to stress in the sensor chip (200). The stress sensor (400) provides a stress signal (y). A compensator (500) of the sensor arrangement (100) is configured to determine a stress compensated sensor signal (z) dependent on the sensor signal (x) and the stress signal (y).
申请公布号 EP3056865(A1) 申请公布日期 2016.08.17
申请号 EP20150000434 申请日期 2015.02.13
申请人 SENSIRION AG 发明人 BÜHLER, JOHANNES;VON WALDKIRCH, MARC;MAYER, FELIX
分类号 G01D3/036 主分类号 G01D3/036
代理机构 代理人
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