| 摘要 |
PROBLEM TO BE SOLVED: To provide a three-dimensional shape measurement device and a three-dimensional shape measurement method by which highly accurate shape measurement is possible to an object to be measured.SOLUTION: In a shape measurement device 1 which scans a lens 10 with a probe ball 23c to acquire three-dimensional shape data on the lens 10, it includes: an XY axis stage 20 which drives a probe 23; a scanning locus generation part 30 which creates a probe scanning locus 14 on the probe ball 23c; a first measurement data storage part 40a which scans a spherical surface prototype 12 while bringing the probe scanning locus 14 into contact with it to acquire first measurement data; a calibration data processing part 41 which acquires calibration data on the probe ball 23c in the probe scanning locus 14 from difference between the first measurement data and design data on the spherical surface prototype 12; a second measurement data storage part 40b which scans the lens 10 while bringing the probe scanning locus 14 into contact with it to acquire second measurement data; and a calibration part 42 which corrects the second measurement data with calibration data to acquire three-dimensional shape data on the lens 10. |
