发明名称 |
METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT |
摘要 |
Methods and devices for high-throughput printing of a precursor material for forming a film of a group IB-IIIA-chalcogenide compound are disclosed. In one embodiment, the method comprises forming a precursor layer on a substrate, the precursor is subsequently processed in a VIA environment. |
申请公布号 |
WO2009076322(A2) |
申请公布日期 |
2009.06.18 |
申请号 |
WO2008US85987 |
申请日期 |
2008.12.08 |
申请人 |
LEIDHOLM, CRAIG;BOLLMAN, BRENT |
发明人 |
LEIDHOLM, CRAIG;BOLLMAN, BRENT |
分类号 |
H01L31/042 |
主分类号 |
H01L31/042 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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