发明名称 METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT
摘要 Methods and devices for high-throughput printing of a precursor material for forming a film of a group IB-IIIA-chalcogenide compound are disclosed. In one embodiment, the method comprises forming a precursor layer on a substrate, the precursor is subsequently processed in a VIA environment.
申请公布号 WO2009076322(A2) 申请公布日期 2009.06.18
申请号 WO2008US85987 申请日期 2008.12.08
申请人 LEIDHOLM, CRAIG;BOLLMAN, BRENT 发明人 LEIDHOLM, CRAIG;BOLLMAN, BRENT
分类号 H01L31/042 主分类号 H01L31/042
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