SETTER PLATE AND METHOD OF PRODUCING SETTER PLATE

摘要

PURPOSE: A setter plate and a manufacturing method thereof are provided to control compositional component and porosity of a zirconia coating layer formed on surface of the setter plate. CONSTITUTION: A setter plate comprises an alumina support formed by extruding an alumina composition and a zirconia coating layer formed by wet-coating the zirconia-based composition on the alumina support. A manufacturing method of the setter plate comprises the following steps: a step forming the alumina support by extruding the alumina composition; a step forming the zirconia coating layer by wet-coating the zirconia based composition on the alumina support; and a step of sintering the obtained products.