| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an actuator having a new structure. <P>SOLUTION: This actuator comprises electrode layers at upper and lower parts of a piezoelectric body layer, a drive arm supported to a board at its one end or at both ends, and a signal line. The drive arm and the board share a part of the layer, and the signal line is bridged over the drive arm so as to be twisted with the drive arm. Due to such a constitution that the drive arm and the board share the part of the layer, not only the layer functions as an elastic layer, but also rigidity can be increased by separately forming a support part on the board. Furthermore, since the signal line is formed above the drive arm, an influence caused by the formation of the piezoelectric body layer is scarcely exhibited, and a proper material (such as Au or Al) can be used for the signal line. <P>COPYRIGHT: (C)2008,JPO&INPIT |
