| 摘要 |
PROBLEM TO BE SOLVED: To provide a simulation method and a simulation program more accurately calculating a form near an interface when taking a large time-step or reducing the number of surface growing rate calculating steps. SOLUTION: In the simulation method of simulating a processing form of a substance surface, using an algorithm of repeating the steps of calculating the surface growing rate and skipping the calculation of the surface growing rate, the surface growing rate is calculated at the step of passing the substance surface across the substance interface. COPYRIGHT: (C)2009,JPO&INPIT
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