| 摘要 |
PROBLEM TO BE SOLVED: To stably peel an unnecessary sheet positioned outside a cut from a release sheet. SOLUTION: A sheet sticking device 10 includes a support means 11 for supporting a rolled material R having an adhesive sheet S temporarily bonded to one surface of a belt-like first release sheet RL1, a driving means 12 for applying paying-out force to the rolled material R, a cutting means 14 for forming a cut C in a closed-loop shape in the adhesive sheet S in a process of paying out the rolled material R, and forming a sheet S1 for sticking inside the cut C, a peel plate 16 which peels an unnecessary sheet positioned outside the cut C from the release sheet, and a sticking means 18 for pressing the sheet S1 for sticking against a wafer W to stick it. The unnecessary sheet S2 is cooled by the cooling means 17 before being peeled by the peel plate 16. COPYRIGHT: (C)2010,JPO&INPIT |
