MEMS infrared sensor including a plasmonic lens

摘要

A portable thermal imaging system includes a portable housing configured to be carried by a user, a bolometer sensor assembly supported by the housing and including an array of thermal sensor elements and at least one plasmonic lens, a memory including program instructions, and a processor operably connected to the memory and to the sensor, and configured to execute the program instructions to obtain signals from each of a selected set of thermal sensor elements of the array of thermal sensor elements, assign each of the obtained signals with a respective color data associated with a temperature of a sensed object, and render the color data.

主权项

1. A portable thermal imaging system comprising:
a portable housing configured to be carried by a user; a bolometer sensor assembly supported by the housing and including an array of thermal sensor elements and at least one plasmonic lens; a memory including program instructions; a processor operably connected to the memory and to the sensor, and configured to execute the program instructions to
obtain signals from each of a selected set of thermal sensor elements of the array of thermal sensor elements,assign each of the obtained signals with a respective color data associated with a temperature of a sensed object, andrender the color data; and an imaging subsystem including a display, the imaging subsystem operably connected to the processor, wherein the processor is further configured to execute the program instructions to render indicia of a field of view of the bolometer sensor assembly on the display, wherein the bolometer sensor assembly further comprises: a substrate having an upper surface supporting the array of thermal sensor elements; and a cap wafer supported by the substrate and including a cap layer spaced apart from the substrate, the cap layer supporting the at least one plasmonic lens.