FLUID SENSOR CHIP AND METHOD FOR MANUFACTURING THE SAME

摘要

A fluid sensor chip includes an isolator substrate including amorphous carbon, an electrical conductor including graphite and an active material including graphene or carbon nanotubes.

主权项

1. A method for manufacturing a fluid sensor chip, comprising:
providing a substrate carrier; providing a conductive layer on the substrate carrier; forming an isolator substrate comprising amorphous carbon above the substrate carrier and the conductive layer; providing an electrical conductor comprising graphite, such that the electrical conductor extends through the isolator substrate and contacts the conductive layer; and depositing an active material comprising graphene or carbon nanotubes onto the isolator substrate and the electrical conductor.