| 摘要 |
PROBLEM TO BE SOLVED: To provide a deactivation processing method and a processing apparatus of microorganism by electron beam irradiation which are capable of lightening physical damage by an electron beam and performing deactivation processing of microorganism at a mouth part of an object to be processed successfully at a low cost with a simple configuration.SOLUTION: A deactivation method by electron beam irradiation includes the steps of: arranging a hollow-shaped object 107 to be processed having an opening part 107b in a processing chamber 102 which is configured to be irradiated with an electron beam 113; and irradiating a region including the arranged object 107 to be processed with the electron beam 113 and supplying predetermined gas 122 excited by the electron beam 113, with which the region is irradiated, at least to the opening part 107b of the object 107 to be processed by air stream 122 created by an air stream creating section 110a. |
