发明名称 分割装置および分割方法
摘要 The invention provides a cutting device and a cutting method. The device can cut cutting predetermined lines of a chip supported in the inside of a cyclic frame with a suitable size corresponding to the chip (a round plate) by a belt body through strip parts and the strip parts cannot intervene with the cyclic frame. A strip unit (50) has a first strip part (51) which is longer than the shortest line of the cutting predetermined lines of the chip (1) and shorter than the longest line and a second strip part (52) which is longer than the longest line. The strip unit moves relative to the chip along the direction vertical to the cutting predetermined lines in a state that the strip parts and the cutting predetermined lines are parallel. The cutting predetermined line of the outer region of the chip is broken through the first strip part (51), the cutting predetermined line of the central region of the chip is broken through the second strip part (52) and therefore the chip is cut. The interference of the strip part and the cyclic frame (7) is prevented through the different strip parts with lengths corresponding to the lengths of the cutting predetermined lines.
申请公布号 JP6047392(B2) 申请公布日期 2016.12.21
申请号 JP20120272203 申请日期 2012.12.13
申请人 株式会社ディスコ 发明人 服部 篤;川口 吉洋
分类号 H01L21/301 主分类号 H01L21/301
代理机构 代理人
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