Depositing layers in oled devices using viscous flow

摘要

A method of depositing a patterned organic layer includes providing a manifold and an OLED display substrate in a chamber at reduced pressure and spaced relative to each other; providing a structure sealingly covering at least one surface of the manifold, the structure including a plurality of nozzles extending through the structure into the manifold. The method also includes delivering vaporized organic materials into the manifold, and applying an inert gas under pressure into the manifold so that the inert gas provides a viscous gas flow through each of the nozzles, such viscous gas flow transporting at least portions of the vaporized organic materials from the manifold through the nozzles to provide directed beams of the inert gas and of the vaporized organic materials and projecting the directed beams onto the OLED display substrate for depositing a pattern of an organic layer on the substrate.