发明名称 単結晶状GeSn含有材料の製造方法
摘要 PROBLEM TO BE SOLVED: To provide a technique for forming a monocrystalline layer through heat treatment at a temperature of the melting point of SiGeSn or GeSn or below by adding Sn.SOLUTION: The present invention relates to a method for producing a monocrystalline GeSn-containing material. The method includes: a preparation step of preparing an amorphous GeSn-containing material held on a holding substrate; a heating step of heating the amorphous GeSn-containing material; and a cooling step of cooling the amorphous GeSn-containing material. Further, the heating step can be performed by heating the amorphous GeSn-containing material up to a temperature of the melting point of the amorphous GeSn-containing material or above.
申请公布号 JP5943341(B2) 申请公布日期 2016.07.05
申请号 JP20120042746 申请日期 2012.02.29
申请人 国立大学法人大阪大学 发明人 志村 考功;渡部 平司;細井 卓治
分类号 H01L21/20;H01L21/336;H01L29/786 主分类号 H01L21/20
代理机构 代理人
主权项
地址