发明名称 Thin film device supply body, method of fabricating thin film device, method of transfer, method of fabricating semiconductor device, and electronic equipment
摘要 A technique is described in which a layer to be transferred is easily peeled and transferred to a transferred body that is pliable or flexible. Also, a method of fabricating a semiconductor device using these peeling and transfer techniques, and electronic equipment fabricated with the semiconductor device is described. A transfer method in which a layer to be transferred formed on a substrate is transferred to a transfer body that is pliable or flexible includes the first step of forming a layer to be transferred on a substrate; the second step of bonding the layer to be transferred formed on the substrate to a transfer body that is pliable or flexible fixed on a fixture; and the third step of peeling the layer to be transferred from the substrate and transferring the layer to be transferred to the transfer body.
申请公布号 US2007287242(A1) 申请公布日期 2007.12.13
申请号 US20070878377 申请日期 2007.07.24
申请人 发明人 KODAIRA TAIMEI;UTSUNOMIYA SUMIO
分类号 H01L21/336;H01L21/68;H01L21/8234;H01L51/00;H01L51/40 主分类号 H01L21/336
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