摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric actuator of lower profile. <P>SOLUTION: The piezoelectric actuator 1 comprises a rail 2 formed of magnetic material in band, and an ultrasonic motor 3 which moves on the rail 2 by the complex vibration of longitudinal vibration and bending vibration. The ultrasonic motor 3 comprises a vibrator 4 set movably on the rail 2, a magnetic plate 5 which comprises extensions 5a and 5b and is fixed on the upper surface of the vibrator 4, two piezoelectric elements 6 and 7 pasted on the upper surface of the vibrator 4, and a pair of magnets 8 and 9 fixed to the extensions 5a and 5b of the magnetic plate 5. The vibrator 4 is pressed against the rail 2 by a magnetic coupling force. <P>COPYRIGHT: (C)2008,JPO&INPIT |