| 摘要 |
PROBLEM TO BE SOLVED: To provide a micro-measuring device capable of varying a magnification and/or detection range without changing an objective. SOLUTION: The micro-measuring device is equipped with: a first intermediate lens L1 fixed in a lens barrel 11 and condensing parallel beams from the objective Lo; a half mirror HM allowing a part of light passing the objective Lo and the first intermediate lens L1 to pass through and bending a part of the light; a second intermediate lens L2 installed movably along an optical path C at a position where the light bent by the half mirror HM passes; a detector 16 provided ahead of the second intermediate lens L2 and installed movably along the optical axis C; moving mechanisms M1 and M2 moving the second intermediate lens L2 and the detector 16 so as to align the image forming position of the detector 16 with a condensing point where light from a sample S is converged by the second intermediate lens L2; and a control part 16 adjusting the moving amount of the moving mechanisms M1 and M2. COPYRIGHT: (C)2008,JPO&INPIT
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