| 摘要 |
PROBLEM TO BE SOLVED: To provide a unit for standing by a slit nozzle, which is lightweight and has small internal volume and consequently has inexpensive manufacturing cost and from which a stored liquid is easily discharged. SOLUTION: When the slit nozzle 3 is immersed in a dip tank 7 which is formed by folding a metallic sheet such as an aluminum sheet into a valley shape having a V-shaped structure when viewed from the end face thereof, cleaning liquid supplied through a rinse supply line 11 is stored in the dip tank 7 while the dip tank 7 is held horizontally by a cylinder 9 for tilting, and the bottom end of the slit nozzle 3 is immersed in the stored cleaning liquid. When the liquid in the dip tank 7 is discharged, the cylinder 9 for tilting is retracted, the connected side of the dip tank to a drain pipe 12 is lowered and the liquid is discharged through the drain pipe 12 by using a pump 13. COPYRIGHT: (C)2009,JPO&INPIT
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