| 摘要 |
PROBLEM TO BE SOLVED: To improve vibration isolation performance without increasing the number of measuring devices for measuring the absolute position of a vibration isolation object.SOLUTION: A vibration isolation device 20 for supporting a base member 24 on a floor FL comprises: an elastic member 48 for supporting the base member 24 with respect to the floor FL; an air damper 40 for suppressing the vibrations of the base member 24 with respect to the floor FL; a position sensor 52 for detecting a position signal corresponding to the position of the base member 24 relative to the floor FL; a motor unit 50 for adjusting the position of the base member 24 relative to the floor FL; and a control system 36 for driving the motor unit 50 in accordance with the position signal detected by the position sensor 52, the control system 36 including a characteristic change unit which electrically converts the stiffness of the elastic member 48 into a target value.SELECTED DRAWING: Figure 2 |
