发明名称 ピックアップ装置
摘要 A pickup apparatus (2) picks up a semiconductor chip (22) through which light can be transmitted. The pickup apparatus (2) is provided with: a thrust-up pin (4), which vertically extends below the semiconductor chip (22), and which is capable of thrusting up the semiconductor chip (22) upward; and a light emitting section (5) that is disposed at a position predetermined with respect to the thrust-up pin (4), said position being below the semiconductor chip (22). The pickup apparatus (2) is also provided with: an image pickup apparatus (6) that is capable of picking up, from above, an image of the semiconductor chip (22) through which light from the light emitting section (5) has been transmitted; and an arithmetic apparatus (8) that calculates a position of the thrust-up pin (4) with respect to the semiconductor chip (22) on the basis of a position of an image of the light emitted from the light emitting section (5), said image having been picked up by means of the image pickup apparatus (6).
申请公布号 JP6033965(B2) 申请公布日期 2016.11.30
申请号 JP20150536354 申请日期 2013.09.11
申请人 富士機械製造株式会社 发明人 大山 茂人;伊藤 利也;早川 昌志
分类号 H01L21/67 主分类号 H01L21/67
代理机构 代理人
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