ALUMINUM NITRIDE SINGLE CRYSTAL AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide an aluminum nitride single crystal excellent in transmissivity of ultraviolet light in a range of wavelength of 240 to 300 nm, a laminate having layers comprising the single crystal, a method for manufacturing the laminate, and a method for manufacturing the aluminum nitride single crystal excellent in the transmissivity of ultraviolet light from the laminate.

SOLUTION: The aluminum nitride single crystal containing oxygen atoms and carbon atoms is characterized by satisfying the condition of the following equation (1): [O]-[C]>0, wherein the concentration of the oxygen atoms is [O] cm-3and the concentration of the carbon atoms is [C] cm-3.

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