| 摘要 |
PROBLEM TO BE SOLVED: To solve a mold release problem with an optical nanoimprint method.SOLUTION: Control is performed so that periods of resin curing completion time can be different from one another depending on each region of a light curing resin pressed against a mold for optical nanoimprint. Thus, strain of the light curing resin cured in a planar direction of a substrate is absorbed, and strain directions of the light curing resin cured in the planar direction of the substrate are prevented from being brought together.SELECTED DRAWING: Figure 1 |
