| 摘要 |
PROBLEM TO BE SOLVED: To provide: a low thermal expansion ceramic in which secular change of flatness can be prevented, and chemical resistance can be improved; a stage for exposure equipment; and a production method of the low thermal expansion ceramic.SOLUTION: A low thermal expansion ceramic is made by compounding a positive expansion material that expands according to temperature rise and a negative expansion material that contracts according to temperature rise, wherein the negative expansion material consists of phosphoric acid zirconium tungstate or zirconium tungstate. In this way, eucryptite is not used as a negative expansion material, thereby a micro crack is not considered as the premise, and thereby secular change of flatness resulting from the micro crack can be prevented. Furthermore, chemical resistance can be improved. |
