发明名称 SEPARATION METHOD FOR DIAMOND LAYER
摘要 Disclosed in the present invention is a separation method for diamond layer. The method comprises the following steps: performing by using laser a two-dimensional scanning to an inner side of to be treated diamond, and forming a non-diamond layer in a depth below the to be treated diamond surface; removing the non-diamond layer to realize up-down separation of the diamond. The method will not damage surface of the diamond substrate, and compared to laser cutting technology, losses in the diamond cutting is reduced; and compared to the ion implantation separation method, cost is saved and manufacturing time is shortened.
申请公布号 WO2016112596(A1) 申请公布日期 2016.07.21
申请号 WO2015CN77120 申请日期 2015.04.21
申请人 XI'AN JIAOTONG UNIVERSITY 发明人 WANG, HONGXING;YAN, JIANPING;WANG, FEI;CHEN, FENG;FU, JIAO;ZHANG, JINGWEN;BU, RENAN;HOU, XUN
分类号 C30B33/04;C30B29/04 主分类号 C30B33/04
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