APPARATUS WITH ON-THE-FLY WORKPIECE CENTERING

摘要

A substrate processing apparatus (100) having a transport apparatus (120), at least one sensor (197) connected to the transport apparatus and a controller (170). The transport apparatus if adapted for transporting the substrate (215) between processing stations (105,110) of the processing apparatus. The sensor is capable of sensing the substrate transported by the transporting apparatus. The sensor is arranged for sending at least one signal in response to sensing the substrate. The controller is communicably connected to the sensor and arranged to determine alignment of the substrate in at least two directions, angled relative to each other, relative to a predetermined location. The controller is capable of determining alignment from the at least one signal identifying no more than two points on the substrate and independent of radial variances between substrates.