| 摘要 |
PURPOSE: A non-dispersive infrared ray gas analyzing device using thermopile is provided to enable to obtain much higher sensitivity when wafer packaging in a vacuum condition. CONSTITUTION: A non-dispersive infrared ray gas analyzing device using thermopile comprises an upper case(20), a lower case, a photo detector(50), and an infrared ray source. A membrane is mounted on the top of the upper case. The lower case is joined to the lower case. A light source insertion hole where an infrared light source is inserted is formed in one side of the lower case. An optical detector insertion hole where an optical detector is inserted is formed in the other side of the lower case. The optical detector and infrared light source are fixed and installed on the PCB(Printed Circuit Board) at a constant interval. Lights projected from the infrared light source are received by the optical detector through a light cavity where the upper and lower cases form. [Reference numerals] (AA) Infrared ray light source |
